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EG-DL130 Series of biaxial XY nanostages dual-axis XY positioning Stage which uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.
EG-DL130 Series of biaxial XY nanostages
Performance Characteristics
⚫ Integrated dual-axis XY linear motor motion platform
⚫ Driven by linear motors and equipped with high-precision crossed roller guides
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness throughout the entire stroke less than ±2μm
⚫ Excellent dynamic performance, dynamic following error less than ±30nm at a constant speed of 1mm/s
⚫ Resolution 1nm, bidirectional repeatability ±100nm to ±150nm, positioning accuracy ±250nm to 300nm
⚫ In-situ stability ±4nm (equipped with high-spec gratings and high-performance controllers)
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EG-DL Series XYZ Three-Axis Linear motor Stage
◆ Highly integrated XY linear motor nanoplatform
◆ Nanoscale performance and long stroke
◆ Low motion error and high stability accuracy
◆ Anti-creep characteristics
◆ High dynamic performance of direct drive technology
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Two-axis integrated linear motor positioning stage EG-DPL-XY SERIES
EG-DPL-XY SERIES Twp axis XY Linear motor stages
Performance Characteristics
⚫ Integrated Dual-Axis XY Linear Motor Motion Platform
⚫ Dual-motor drive for upper and lower axes, equipped with high-precision crossed roller guides
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness throughout the entire stroke less than ±2µm
⚫ Excellent dynamic performance, position error less than ±20nm at a constant speed of 1mm/s
⚫ Resolution 1nm, repeatability ±100nm to ±150nm, positioning accuracy ±200nm to ±400nm
⚫ In-situ stability ±3nm (equipped with high-spec grating and high-performance controller)
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EG-DPLA SERIES dual-axis XY positioning hollow Stage uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.
EG-DPLA SERIES dual-axis XY positioning hollow Stage
Performance Characteristics
⚫ Dual-axis integrated hollow linear positioning platform
⚫ The lower axis is driven by dual linear motors, and the upper axis is driven by a single linear motor, equipped with high-precision cross roller guides.
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness less than ±1.75μm
⚫ Resolution 1nm, repeatability ±150nm, positioning accuracy ±300nm
⚫ Strong load-bearing capacity, maximum horizontal load 25kg
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Precision five-axis linkage motion system P5ALS-AB
P5ALS-AB Series Model P5ALS-200.90.360U200.200.A Product Introduction
The P5ALS-AB series is a new series of 5-axis precision motion systems launched by our company for high-precision 5-axis linkage processing or linkage detection and other high-demand industry applications. The system uses natural granite as the bed, welded integrated frame and air-floating precision vibration isolators, which can well isolate the various vibrations that the equipment is subjected to during use. At the same time, each linear axis uses the motion mechanism of the air-floating guide linear motor, and with the AC axis driven by the high-precision direct drive motor, it can obtain very high spatial positioning accuracy. This system also uses a motion control system that supports the RTCP tool tip following algorithm, which can very well complete some special trajectory calculations and controls. Main features of the P5ALS-AB series The XY axis uses air static pressure guide rails as the guide mechanism, which has very good straightness, flatness and pitch and yaw performance, which is the requirement and basis for high spatial positioning accuracy. All 5-axis systems use absolute value gratings as feedback, which can be used immediately after power-on, eliminating the time required for the incremental encoder of the multi-axis system to return to zero and greatly reducing errors. The Z axis uses a high-performance linear motor motion mechanism, and is equipped with a load-adjustable balance system and a brake mechanism, which greatly improves the reliability and safety of the equipment during movement. The AC axis uses a high-precision direct-drive motor and reducer, which can achieve high-precision motion while ensuring sufficient drive torque and stable accuracy. The AC axis can also be equipped with a higher-precision air-floating turntable or spindle. The default recommendation is to use the ACS motion control system, which supports RTCP tool tip following, five-axis linkage, GCODE and other functions, and has very good control effects and development scalability. BECKHOF
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E-LMT-XY (High precisionLinear Motor Stage) XY Linear motor motion Stage
● Travel range 100 mm × 100 mm or 200 mm × 200 mm
● Unidirectional repeatability to 0.3 µm
● Ironless 3-phase linear motor
● Velocity to 500 mm/s Incremental
● linear encoder with 4.88 nm resolution
● Crossed roller guides
● Linear motors
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Quodropod Parallel Kinematic stage Four-point support angle adjustment lifting stage (large load)
QP Series Parallel Kinematic stage
Parallel Kinematic stage Four-point support angle adjustment Z axis lifting stage
Customizable, vacuum and ultra-high vacuum versions
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E-TRI Series E-TRI-VM-R1 Parallel Motion Stage
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
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E-HEX-90.6.60.60 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages
Features:
High precision, can be assembled, can be customized, light aperture 460mmDelivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path. -
6-Axis Hexapod Tri-pod structer E-HEX-10.6.100.100-XXX Series Parallel six degrees of freedom stages
Features:
High precision, can be assembled, can be customized, light aperture 460mmDelivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path. -
HEX-S6.50.200 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages
Features:
High precision, can be assembled, can be customized, light aperture 460mmDelivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path. -
E-LMT-XYZ (high precision Integrated combination XYZ Axis stage)
Elevation Stage with Excellent Straightness and Flatness of MotionThe vertical stage platform design provides excellent straightness and flatness, with better pitch and yawperformance compared to vertically mounted linear positioning stages, where the cantilevered load can causedeflections in the supporting linear bearings.High Resolution Linear Motion with voice Servo MotorsE-ABVT-Z is internally driven by a voice coil motor, equippedwith an air-floating transfer rail (cross ball guide rails can also be used), and uses a high-resolution grating to closethe loop, and is equipped with a high-performance driver to ensure the minimum displacement and repeatability ofthe positioning stage. achieve great performance.Computer Control, Software, Programming
